Evaluation of the Component of Bias of X-Ray Microanalysis Related to Surface Relief of the Specimen
- Авторы: Vasil’ev A.L.1, Mityukhlyaev V.B.2, Mikhutkin A.A.1, Todua P.A.2,3, Filippov M.N.2,3,4
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Учреждения:
- National Research Center Kurchatov Institute
- Research Center on the Study of Properties of Surface and Vacuum
- Moscow Institute of Physics and Technology
- Kurnakov Institute of General and Inorganic Chemistry
- Выпуск: Том 53, № 14 (2017)
- Страницы: 1463-1466
- Раздел: Analysis of Substances
- URL: https://journals.rcsi.science/0020-1685/article/view/158366
- DOI: https://doi.org/10.1134/S0020168517140163
- ID: 158366
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Аннотация
A semiempirical approach to the a priori evaluation of the effect of the surface relief on the results of X-ray spectral analysis of binary compounds is proposed. Dimensionless parameter k characterizing the effect of the relief on the intensity of intrinsic X-ray radiation is determined using the experimental data obtained for reference monocrystal specimens GaAs with known geometrical parameters of the relief.
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Об авторах
A. Vasil’ev
National Research Center Kurchatov Institute
Email: fgupnicpv@mail.ru
Россия, Moscow
V. Mityukhlyaev
Research Center on the Study of Properties of Surface and Vacuum
Email: fgupnicpv@mail.ru
Россия, Moscow
A. Mikhutkin
National Research Center Kurchatov Institute
Email: fgupnicpv@mail.ru
Россия, Moscow
P. Todua
Research Center on the Study of Properties of Surface and Vacuum; Moscow Institute of Physics and Technology
Автор, ответственный за переписку.
Email: fgupnicpv@mail.ru
Россия, Moscow; Dolgoprudnyi
M. Filippov
Research Center on the Study of Properties of Surface and Vacuum; Moscow Institute of Physics and Technology; Kurnakov Institute of General and Inorganic Chemistry
Email: fgupnicpv@mail.ru
Россия, Moscow; Dolgoprudnyi; Moscow
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