Gigahertz MEMS Clock Generator

Resumo

An intensely developing aspect of advanced microelectronics is microelectromechanical systems (MEMS). The present paper describes various issues associated with the development of a new MEMS clock generator capable of operating at gigahertz frequencies. The main features of generating and supporting forced oscillations of the moving electrode under the action of electrostatic forces are analyzed. A possibility of supporting such oscillations under conditions of high inertial g-loads (up to 10⁶g and more) is demonstrated. A mathematical model of a micro-oscillator is developed, and the basic regimes of its operation are described.