Automated interference tools of the All-Russian Research Institute for Optical and Physical Measurements

G. N. Vishnyakov; G. G. Levin; V. L. Minaev

doi:10.3103/S8756699017050132

Automated interference tools of the All-Russian Research Institute for Optical and Physical Measurements

作者: Vishnyakov G.N.¹, Levin G.G.¹, Minaev V.L.¹
隶属关系:
1. All-Russian Research Institute for Optical and Physical Measurements
期: 卷 53, 编号 5 (2017)
页面: 530-536
栏目: Interference Systems and Devices
URL: https://journals.rcsi.science/8756-6990/article/view/212259
DOI: https://doi.org/10.3103/S8756699017050132
ID: 212259

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详细

A review of advanced equipment for automated interference measurements developed at the All-Russian Research Institute for Optical and Physical Measurements is given. Three types of interference microscopes based on the Linnik, Twyman–Green, and Fizeau interferometers with the use of the phase stepping method are presented.