Email this article Automated interference tools of the All-Russian Research Institute for Optical and Physical Measurements
- Authors: Vishnyakov G.N.1, Levin G.G.1, Minaev V.L.1
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Affiliations:
- All-Russian Research Institute for Optical and Physical Measurements
- Issue: Vol 53, No 5 (2017)
- Pages: 530-536
- Section: Interference Systems and Devices
- URL: https://journals.rcsi.science/8756-6990/article/view/212259
- DOI: https://doi.org/10.3103/S8756699017050132
- ID: 212259
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Abstract
A review of advanced equipment for automated interference measurements developed at the All-Russian Research Institute for Optical and Physical Measurements is given. Three types of interference microscopes based on the Linnik, Twyman–Green, and Fizeau interferometers with the use of the phase stepping method are presented.
About the authors
G. N. Vishnyakov
All-Russian Research Institute for Optical and Physical Measurements
Author for correspondence.
Email: vish@vniiofi.ru
Russian Federation, ul. Ozernaya 46, Moscow, 119361
G. G. Levin
All-Russian Research Institute for Optical and Physical Measurements
Email: vish@vniiofi.ru
Russian Federation, ul. Ozernaya 46, Moscow, 119361
V. L. Minaev
All-Russian Research Institute for Optical and Physical Measurements
Email: vish@vniiofi.ru
Russian Federation, ul. Ozernaya 46, Moscow, 119361
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