Мақаланы E-mail арқылы жіберу Automated interference tools of the All-Russian Research Institute for Optical and Physical Measurements
- Авторлар: Vishnyakov G.N.1, Levin G.G.1, Minaev V.L.1
-
Мекемелер:
- All-Russian Research Institute for Optical and Physical Measurements
- Шығарылым: Том 53, № 5 (2017)
- Беттер: 530-536
- Бөлім: Interference Systems and Devices
- URL: https://journals.rcsi.science/8756-6990/article/view/212259
- DOI: https://doi.org/10.3103/S8756699017050132
- ID: 212259
Дәйексөз келтіру
Ашық рұқсат
Рұқсат берілді
Тек жазылушылар үшін
Аннотация
A review of advanced equipment for automated interference measurements developed at the All-Russian Research Institute for Optical and Physical Measurements is given. Three types of interference microscopes based on the Linnik, Twyman–Green, and Fizeau interferometers with the use of the phase stepping method are presented.
Негізгі сөздер
Авторлар туралы
G. Vishnyakov
All-Russian Research Institute for Optical and Physical Measurements
Хат алмасуға жауапты Автор.
Email: vish@vniiofi.ru
Ресей, ul. Ozernaya 46, Moscow, 119361
G. Levin
All-Russian Research Institute for Optical and Physical Measurements
Email: vish@vniiofi.ru
Ресей, ul. Ozernaya 46, Moscow, 119361
V. Minaev
All-Russian Research Institute for Optical and Physical Measurements
Email: vish@vniiofi.ru
Ресей, ul. Ozernaya 46, Moscow, 119361
Қосымша файлдар
