Properties of thin films of tungsten sulfide and copper sulfide produced by magnetron sputtering method


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This article describes investigations into the properties of thin films of tungsten sulfide and copper sulfide produced by magnetron sputtering on glass substrates in argon atmosphere. Transmittance spectra of the obtained films are studied by spectrophotometry in the range from 300 to 900 nm; the band gaps are determined. The thickness of the obtained films varies in the range of 0.5–1 μm.

作者简介

V. An

Tomsk Polytechnic University

编辑信件的主要联系方式.
Email: an_vladimir@tpu.ru
俄罗斯联邦, Tomsk

V. Pogrebenkov

Tomsk Polytechnic University

Email: an_vladimir@tpu.ru
俄罗斯联邦, Tomsk

A. Zakharov

Institute of High Current Electronics, Tomsk Scientific Center, Siberian Branch

Email: an_vladimir@tpu.ru
俄罗斯联邦, Tomsk


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