Properties of thin films of tungsten sulfide and copper sulfide produced by magnetron sputtering method


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This article describes investigations into the properties of thin films of tungsten sulfide and copper sulfide produced by magnetron sputtering on glass substrates in argon atmosphere. Transmittance spectra of the obtained films are studied by spectrophotometry in the range from 300 to 900 nm; the band gaps are determined. The thickness of the obtained films varies in the range of 0.5–1 μm.

Sobre autores

V. An

Tomsk Polytechnic University

Autor responsável pela correspondência
Email: an_vladimir@tpu.ru
Rússia, Tomsk

V. Pogrebenkov

Tomsk Polytechnic University

Email: an_vladimir@tpu.ru
Rússia, Tomsk

A. Zakharov

Institute of High Current Electronics, Tomsk Scientific Center, Siberian Branch

Email: an_vladimir@tpu.ru
Rússia, Tomsk

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