Composition and structure of copper oxide films synthesized by reactive magnetron sputtering with a hot target
- Authors: Lapshin A.E.1, Levitskii V.S.2, Shapovalov V.I.2, Komlev A.E.2, Shutova E.S.2, Myl’nikov I.L.2, Komlev A.A.2
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Affiliations:
- Grebenshchikov Institute of Silicate Chemistry
- St. Petersburg Electrotechnical University LETI
- Issue: Vol 42, No 4 (2016)
- Pages: 359-362
- Section: Article
- URL: https://journals.rcsi.science/1087-6596/article/view/215620
- DOI: https://doi.org/10.1134/S108765961604009X
- ID: 215620
Cite item
Abstract
The influence of the target operation mode on the chemical composition and crystalline structure of copper oxide films deposited onto a quartz glass substrate has been studied using Raman spectroscopy and X-ray phase analysis. The films have been synthesized in an Ar + O2 gaseous environment using two identical magnetrons, differing only by the method of target cooling.
About the authors
A. E. Lapshin
Grebenshchikov Institute of Silicate Chemistry
Author for correspondence.
Email: andlap@mail.ru
Russian Federation, nab. Makarova 2, St. Petersburg, 199034
V. S. Levitskii
St. Petersburg Electrotechnical University LETI
Email: vishapovalov@mail.ru
Russian Federation, ul. Prof. Popova 5, St. Petersburg, 197376
V. I. Shapovalov
St. Petersburg Electrotechnical University LETI
Author for correspondence.
Email: vishapovalov@mail.ru
Russian Federation, ul. Prof. Popova 5, St. Petersburg, 197376
A. E. Komlev
St. Petersburg Electrotechnical University LETI
Email: vishapovalov@mail.ru
Russian Federation, ul. Prof. Popova 5, St. Petersburg, 197376
E. S. Shutova
St. Petersburg Electrotechnical University LETI
Email: vishapovalov@mail.ru
Russian Federation, ul. Prof. Popova 5, St. Petersburg, 197376
I. L. Myl’nikov
St. Petersburg Electrotechnical University LETI
Email: vishapovalov@mail.ru
Russian Federation, ul. Prof. Popova 5, St. Petersburg, 197376
A. A. Komlev
St. Petersburg Electrotechnical University LETI
Email: vishapovalov@mail.ru
Russian Federation, ul. Prof. Popova 5, St. Petersburg, 197376