Composition and structure of copper oxide films synthesized by reactive magnetron sputtering with a hot target

A. E. Lapshin; V. S. Levitskii; V. I. Shapovalov; A. E. Komlev; E. S. Shutova; I. L. Myl’nikov; A. A. Komlev

doi:10.1134/S108765961604009X

Composition and structure of copper oxide films synthesized by reactive magnetron sputtering with a hot target

Authors: Lapshin A.E.¹, Levitskii V.S.², Shapovalov V.I.², Komlev A.E.², Shutova E.S.², Myl’nikov I.L.², Komlev A.A.²
Affiliations:
1. Grebenshchikov Institute of Silicate Chemistry
2. St. Petersburg Electrotechnical University LETI
Issue: Vol 42, No 4 (2016)
Pages: 359-362
Section: Article
URL: https://journals.rcsi.science/1087-6596/article/view/215620
DOI: https://doi.org/10.1134/S108765961604009X
ID: 215620

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Abstract
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Abstract

The influence of the target operation mode on the chemical composition and crystalline structure of copper oxide films deposited onto a quartz glass substrate has been studied using Raman spectroscopy and X-ray phase analysis. The films have been synthesized in an Ar + O₂ gaseous environment using two identical magnetrons, differing only by the method of target cooling.

Keywords

films, copper oxide, reactive magnetron sputtering, hot and cold targets, Raman spectroscopy, X-ray phase analysis, composition, structure

About the authors

A. E. Lapshin

Grebenshchikov Institute of Silicate Chemistry

Author for correspondence.
Email: andlap@mail.ru
Russian Federation, nab. Makarova 2, St. Petersburg, 199034