Email this article Aluminum hydroxocarboxylates in solution deposition of planarization alumina films
- Authors: Tsymbarenko D.M.1, Martynova I.A.1, Ryzhkov N.V.1, Kuz’mina N.P.1
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Affiliations:
- Lomonosov Moscow State University
- Issue: Vol 87, No 6 (2017)
- Pages: 1209-1216
- Section: Article
- URL: https://journals.rcsi.science/1070-3632/article/view/220241
- DOI: https://doi.org/10.1134/S1070363217060172
- ID: 220241
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Abstract
Aluminum hydroxocarboxylates derived from butyric, pivalic, valeric, and isovaleric acids were synthesized and characterized. The synthesized hydroxocarboxylates were suspended in isopropanol and reacted with diethylenetriamine and monoethanolamine, which acted as hydrolyzing and complex-forming agents, to obtain precursor solutions for chemical deposition of smooth amorphous alumina films on metal substrates.
About the authors
D. M. Tsymbarenko
Lomonosov Moscow State University
Author for correspondence.
Email: tsymbarenko@gmail.com
Russian Federation, Moscow, 119991
I. A. Martynova
Lomonosov Moscow State University
Email: tsymbarenko@gmail.com
Russian Federation, Moscow, 119991
N. V. Ryzhkov
Lomonosov Moscow State University
Email: tsymbarenko@gmail.com
Russian Federation, Moscow, 119991
N. P. Kuz’mina
Lomonosov Moscow State University
Email: tsymbarenko@gmail.com
Russian Federation, Moscow, 119991
