Aluminum hydroxocarboxylates in solution deposition of planarization alumina films
- Авторы: Tsymbarenko D.1, Martynova I.1, Ryzhkov N.1, Kuz’mina N.1
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Учреждения:
- Lomonosov Moscow State University
- Выпуск: Том 87, № 6 (2017)
- Страницы: 1209-1216
- Раздел: Article
- URL: https://journals.rcsi.science/1070-3632/article/view/220241
- DOI: https://doi.org/10.1134/S1070363217060172
- ID: 220241
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Аннотация
Aluminum hydroxocarboxylates derived from butyric, pivalic, valeric, and isovaleric acids were synthesized and characterized. The synthesized hydroxocarboxylates were suspended in isopropanol and reacted with diethylenetriamine and monoethanolamine, which acted as hydrolyzing and complex-forming agents, to obtain precursor solutions for chemical deposition of smooth amorphous alumina films on metal substrates.
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Об авторах
D. Tsymbarenko
Lomonosov Moscow State University
Автор, ответственный за переписку.
Email: tsymbarenko@gmail.com
Россия, Moscow, 119991
I. Martynova
Lomonosov Moscow State University
Email: tsymbarenko@gmail.com
Россия, Moscow, 119991
N. Ryzhkov
Lomonosov Moscow State University
Email: tsymbarenko@gmail.com
Россия, Moscow, 119991
N. Kuz’mina
Lomonosov Moscow State University
Email: tsymbarenko@gmail.com
Россия, Moscow, 119991