The effect of detuning of the partial frequency of MEMS gyros sensing elements on the amplitude-frequency response


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Abstract

The effect of detuning the partial frequencies of MEMS gyroscopes on its amplitudefrequency response is investigated. The formulated mathematical model allows defining requirements for the tolerances on gyros parameters, which determine the values of gyros partial frequencies, at the design stage of the sensor.

About the authors

V. M. Pankratov

Institute of Precision Mechanics and Control

Author for correspondence.
Email: vmpank@mail.ru
Russian Federation, ul. Rabochaya 24, Saratov, 410028

M. A. Barulina

Institute of Precision Mechanics and Control

Email: vmpank@mail.ru
Russian Federation, ul. Rabochaya 24, Saratov, 410028

A. V. Krys’ko

Saratov State Technical University

Email: vmpank@mail.ru
Russian Federation, Polytechnicheskaya ul. 77, Saratov, 410054

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