Email this article Influence of Cathode Structure and Configuration on Complex Nitride Coatings
- Authors: Tabakov V.P.1, Shirmanov N.A.1, Sizov S.V.1, Chikhranov A.V.1
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Affiliations:
- Ul’yanovsk State Technical University
- Issue: Vol 37, No 12 (2017)
- Pages: 1048-1051
- Section: Article
- URL: https://journals.rcsi.science/1068-798X/article/view/227196
- DOI: https://doi.org/10.3103/S1068798X17120176
- ID: 227196
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Abstract
The production of complex (multielement) nitride coatings on the basis of different cathode structure and configuration is considered. The coatings obtained by means of one-piece and composite cathodes have different properties. This difference is smaller for multielement coatings.
About the authors
V. P. Tabakov
Ul’yanovsk State Technical University
Email: chihranov@mail.ru
Russian Federation, Ul’yanovsk
N. A. Shirmanov
Ul’yanovsk State Technical University
Email: chihranov@mail.ru
Russian Federation, Ul’yanovsk
S. V. Sizov
Ul’yanovsk State Technical University
Email: chihranov@mail.ru
Russian Federation, Ul’yanovsk
A. V. Chikhranov
Ul’yanovsk State Technical University
Author for correspondence.
Email: chihranov@mail.ru
Russian Federation, Ul’yanovsk
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