Influence of Cathode Structure and Configuration on Complex Nitride Coatings

V. P. Tabakov; N. A. Shirmanov; S. V. Sizov; A. V. Chikhranov

doi:10.3103/S1068798X17120176

Influence of Cathode Structure and Configuration on Complex Nitride Coatings

作者: Tabakov V.P.¹, Shirmanov N.A.¹, Sizov S.V.¹, Chikhranov A.V.¹
隶属关系:
1. Ul’yanovsk State Technical University
期: 卷 37, 编号 12 (2017)
页面: 1048-1051
栏目: Article
URL: https://journals.rcsi.science/1068-798X/article/view/227196
DOI: https://doi.org/10.3103/S1068798X17120176
ID: 227196

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详细

The production of complex (multielement) nitride coatings on the basis of different cathode structure and configuration is considered. The coatings obtained by means of one-piece and composite cathodes have different properties. This difference is smaller for multielement coatings.