Fundamental Limitations on Miniaturization of Shape-Memory Micromechanical Devices. Thermoelastic Martensite Transformation on Micro-, Nano-, and Mesoscales
- 作者: Lega P.1, Koledov V.1, Tabachkova N.2, Irzhak A.2,3, Shelayakov A.4, Kuchin D.1, Orlov A.1, Shavrov V.1
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隶属关系:
- Kotel’nikov Institute of Radio Engineering and Electronics
- National University of Science and Technology MISIS
- National Research Nuclear University MEPhI
- Institute of Microelectronic Technology and Ultrahigh-Purity Materials
- 期: 卷 63, 编号 5 (2018)
- 页面: 468-475
- 栏目: Nanoelectronics
- URL: https://journals.rcsi.science/1064-2269/article/view/199779
- DOI: https://doi.org/10.1134/S1064226918050066
- ID: 199779
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详细
TEM measurements are used to experimentally study thermoelastic martensite transformation in Ti2NiCu tapered plates. The martensite phase is observed at room temperature in the Ti2NiCu alloy when the plate thickness decreases to, at least, 80 nm, and the austenite phase is observed at smaller thicknesses. It is shown that the temperature of thermoelastic martensite transition in the Ti2NiCu alloy decreases with a decrease in the thickness of the plate, the transition is blocked at a thickness of less than 20 nm, and a hysteresis dependence is observed. Possible physical and technological reasons for blocking of the martensite phase transition on nanoscale and fundamental limitations on the sizes of micromechanical devices based on the shape-memory Ti2NiCu alloy are considered.
作者简介
P. Lega
Kotel’nikov Institute of Radio Engineering and Electronics
编辑信件的主要联系方式.
Email: lega_peter@list.ru
俄罗斯联邦, Moscow, 125009
V. Koledov
Kotel’nikov Institute of Radio Engineering and Electronics
Email: lega_peter@list.ru
俄罗斯联邦, Moscow, 125009
N. Tabachkova
National University of Science and Technology MISIS
Email: lega_peter@list.ru
俄罗斯联邦, Moscow, 119049
A. Irzhak
National University of Science and Technology MISIS; National Research Nuclear University MEPhI
Email: lega_peter@list.ru
俄罗斯联邦, Moscow, 119049; Moscow, 115409
A. Shelayakov
Institute of Microelectronic Technology and Ultrahigh-Purity Materials
Email: lega_peter@list.ru
俄罗斯联邦, Chernogolovka, Moscow oblast, 142432
D. Kuchin
Kotel’nikov Institute of Radio Engineering and Electronics
Email: lega_peter@list.ru
俄罗斯联邦, Moscow, 125009
A. Orlov
Kotel’nikov Institute of Radio Engineering and Electronics
Email: lega_peter@list.ru
俄罗斯联邦, Moscow, 125009
V. Shavrov
Kotel’nikov Institute of Radio Engineering and Electronics
Email: lega_peter@list.ru
俄罗斯联邦, Moscow, 125009