Fundamental Limitations on Miniaturization of Shape-Memory Micromechanical Devices. Thermoelastic Martensite Transformation on Micro-, Nano-, and Mesoscales
- Авторы: Lega P.1, Koledov V.1, Tabachkova N.2, Irzhak A.2,3, Shelayakov A.4, Kuchin D.1, Orlov A.1, Shavrov V.1
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Учреждения:
- Kotel’nikov Institute of Radio Engineering and Electronics
- National University of Science and Technology MISIS
- National Research Nuclear University MEPhI
- Institute of Microelectronic Technology and Ultrahigh-Purity Materials
- Выпуск: Том 63, № 5 (2018)
- Страницы: 468-475
- Раздел: Nanoelectronics
- URL: https://journals.rcsi.science/1064-2269/article/view/199779
- DOI: https://doi.org/10.1134/S1064226918050066
- ID: 199779
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Аннотация
TEM measurements are used to experimentally study thermoelastic martensite transformation in Ti2NiCu tapered plates. The martensite phase is observed at room temperature in the Ti2NiCu alloy when the plate thickness decreases to, at least, 80 nm, and the austenite phase is observed at smaller thicknesses. It is shown that the temperature of thermoelastic martensite transition in the Ti2NiCu alloy decreases with a decrease in the thickness of the plate, the transition is blocked at a thickness of less than 20 nm, and a hysteresis dependence is observed. Possible physical and technological reasons for blocking of the martensite phase transition on nanoscale and fundamental limitations on the sizes of micromechanical devices based on the shape-memory Ti2NiCu alloy are considered.
Об авторах
P. Lega
Kotel’nikov Institute of Radio Engineering and Electronics
Автор, ответственный за переписку.
Email: lega_peter@list.ru
Россия, Moscow, 125009
V. Koledov
Kotel’nikov Institute of Radio Engineering and Electronics
Email: lega_peter@list.ru
Россия, Moscow, 125009
N. Tabachkova
National University of Science and Technology MISIS
Email: lega_peter@list.ru
Россия, Moscow, 119049
A. Irzhak
National University of Science and Technology MISIS; National Research Nuclear University MEPhI
Email: lega_peter@list.ru
Россия, Moscow, 119049; Moscow, 115409
A. Shelayakov
Institute of Microelectronic Technology and Ultrahigh-Purity Materials
Email: lega_peter@list.ru
Россия, Chernogolovka, Moscow oblast, 142432
D. Kuchin
Kotel’nikov Institute of Radio Engineering and Electronics
Email: lega_peter@list.ru
Россия, Moscow, 125009
A. Orlov
Kotel’nikov Institute of Radio Engineering and Electronics
Email: lega_peter@list.ru
Россия, Moscow, 125009
V. Shavrov
Kotel’nikov Institute of Radio Engineering and Electronics
Email: lega_peter@list.ru
Россия, Moscow, 125009