Fundamental Limitations on Miniaturization of Shape-Memory Micromechanical Devices. Thermoelastic Martensite Transformation on Micro-, Nano-, and Mesoscales
- Authors: Lega P.V.1, Koledov V.V.1, Tabachkova N.Y.2, Irzhak A.V.2,3, Shelayakov A.V.4, Kuchin D.S.1, Orlov A.P.1, Shavrov V.G.1
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Affiliations:
- Kotel’nikov Institute of Radio Engineering and Electronics
- National University of Science and Technology MISIS
- National Research Nuclear University MEPhI
- Institute of Microelectronic Technology and Ultrahigh-Purity Materials
- Issue: Vol 63, No 5 (2018)
- Pages: 468-475
- Section: Nanoelectronics
- URL: https://journals.rcsi.science/1064-2269/article/view/199779
- DOI: https://doi.org/10.1134/S1064226918050066
- ID: 199779
Cite item
Abstract
TEM measurements are used to experimentally study thermoelastic martensite transformation in Ti2NiCu tapered plates. The martensite phase is observed at room temperature in the Ti2NiCu alloy when the plate thickness decreases to, at least, 80 nm, and the austenite phase is observed at smaller thicknesses. It is shown that the temperature of thermoelastic martensite transition in the Ti2NiCu alloy decreases with a decrease in the thickness of the plate, the transition is blocked at a thickness of less than 20 nm, and a hysteresis dependence is observed. Possible physical and technological reasons for blocking of the martensite phase transition on nanoscale and fundamental limitations on the sizes of micromechanical devices based on the shape-memory Ti2NiCu alloy are considered.
About the authors
P. V. Lega
Kotel’nikov Institute of Radio Engineering and Electronics
Author for correspondence.
Email: lega_peter@list.ru
Russian Federation, Moscow, 125009
V. V. Koledov
Kotel’nikov Institute of Radio Engineering and Electronics
Email: lega_peter@list.ru
Russian Federation, Moscow, 125009
N. Yu. Tabachkova
National University of Science and Technology MISIS
Email: lega_peter@list.ru
Russian Federation, Moscow, 119049
A. V. Irzhak
National University of Science and Technology MISIS; National Research Nuclear University MEPhI
Email: lega_peter@list.ru
Russian Federation, Moscow, 119049; Moscow, 115409
A. V. Shelayakov
Institute of Microelectronic Technology and Ultrahigh-Purity Materials
Email: lega_peter@list.ru
Russian Federation, Chernogolovka, Moscow oblast, 142432
D. S. Kuchin
Kotel’nikov Institute of Radio Engineering and Electronics
Email: lega_peter@list.ru
Russian Federation, Moscow, 125009
A. P. Orlov
Kotel’nikov Institute of Radio Engineering and Electronics
Email: lega_peter@list.ru
Russian Federation, Moscow, 125009
V. G. Shavrov
Kotel’nikov Institute of Radio Engineering and Electronics
Email: lega_peter@list.ru
Russian Federation, Moscow, 125009