Composition, morphology, and electronic structure of the nanophases created on the SiO2 Surface by Ar+ ion bombardment


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The influence of Ar+ bombardment on the composition and the structure of the SiO2/Si surface is studied. A thin Si film is found to form on the SiO2 surface subjected to high-dose ion bombardment.

作者简介

M. Yusupjanova

Tashkent State Technical University

编辑信件的主要联系方式.
Email: ftmet@rambler.ru
乌兹别克斯坦, ul. Universitetskaya 2, Tashkent, 100095

D. Tashmukhamedova

Tashkent State Technical University

Email: ftmet@rambler.ru
乌兹别克斯坦, ul. Universitetskaya 2, Tashkent, 100095

B. Umirzakov

Tashkent State Technical University

Email: ftmet@rambler.ru
乌兹别克斯坦, ul. Universitetskaya 2, Tashkent, 100095


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