Composition, morphology, and electronic structure of the nanophases created on the SiO2 Surface by Ar+ ion bombardment
- 作者: Yusupjanova M.B.1, Tashmukhamedova D.A.1, Umirzakov B.E.1
 - 
							隶属关系: 
							
- Tashkent State Technical University
 
 - 期: 卷 61, 编号 4 (2016)
 - 页面: 628-630
 - 栏目: Short Communications
 - URL: https://journals.rcsi.science/1063-7842/article/view/197114
 - DOI: https://doi.org/10.1134/S1063784216040253
 - ID: 197114
 
如何引用文章
详细
The influence of Ar+ bombardment on the composition and the structure of the SiO2/Si surface is studied. A thin Si film is found to form on the SiO2 surface subjected to high-dose ion bombardment.
作者简介
M. Yusupjanova
Tashkent State Technical University
							编辑信件的主要联系方式.
							Email: ftmet@rambler.ru
				                					                																			                												                	乌兹别克斯坦, 							ul. Universitetskaya 2, Tashkent, 100095						
D. Tashmukhamedova
Tashkent State Technical University
														Email: ftmet@rambler.ru
				                					                																			                												                	乌兹别克斯坦, 							ul. Universitetskaya 2, Tashkent, 100095						
B. Umirzakov
Tashkent State Technical University
														Email: ftmet@rambler.ru
				                					                																			                												                	乌兹别克斯坦, 							ul. Universitetskaya 2, Tashkent, 100095						
补充文件
				
			
						
						
						
						
					
				