Finite Element Simulation of Frequency Response of MEMS-Microphone
- 作者: Grigor’ev D.1, Godovitsyn I.1, Amelichev V.1, Generalov S.1
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隶属关系:
- Scientific-Manufacturing Complex Technological Center MIET
- 期: 卷 47, 编号 3 (2018)
- 页面: 211-216
- 栏目: Article
- URL: https://journals.rcsi.science/1063-7397/article/view/186838
- DOI: https://doi.org/10.1134/S106373971803006X
- ID: 186838
如何引用文章
详细
The frequency response of a MEMS microphone is largely dependent on the design and size of the package. The location and size of the acoustic port, the dimensions of the front and back chamber, and the packaging material are of key importance. In this paper we present the results of calculating the frequency response of a MEMS microphone obtained by finite element modeling (FEM) for two main types of packaging with different positions of the acoustic port. The simulation results are analyzed and compared to the measured frequency response of the MEMS microphone.
作者简介
D. Grigor’ev
Scientific-Manufacturing Complex Technological Center MIET
编辑信件的主要联系方式.
Email: D.Grigorev@tcen.ru
俄罗斯联邦, Zelenograd, Moscow oblast, 124498
I. Godovitsyn
Scientific-Manufacturing Complex Technological Center MIET
Email: D.Grigorev@tcen.ru
俄罗斯联邦, Zelenograd, Moscow oblast, 124498
V. Amelichev
Scientific-Manufacturing Complex Technological Center MIET
Email: D.Grigorev@tcen.ru
俄罗斯联邦, Zelenograd, Moscow oblast, 124498
S. Generalov
Scientific-Manufacturing Complex Technological Center MIET
Email: D.Grigorev@tcen.ru
俄罗斯联邦, Zelenograd, Moscow oblast, 124498