X-ray Diffractometry Studies of the Structural Properties of Solid Solutions Based on Gallium Nitride
- 作者: Vigdorovich E.1, Ermoshin I.2
-
隶属关系:
- Physico-Technological Institute
- ZAO Elma-Malakhit
- 期: 卷 46, 编号 7 (2017)
- 页面: 458-461
- 栏目: Article
- URL: https://journals.rcsi.science/1063-7397/article/view/186618
- DOI: https://doi.org/10.1134/S1063739717070149
- ID: 186618
如何引用文章
详细
Features of diffractometry multilayer heterostructures based on gallium nitride have been considered. Using a Vector-GaN instrument for X-ray diffractometry, the effect of the technological conditions of the preparation of the layers of the GaAlN/InGaN/GaN/Al2O3 heterostructure on their structural perfection has been demonstrated.
作者简介
E. Vigdorovich
Physico-Technological Institute
编辑信件的主要联系方式.
Email: evgig@mail.ru
俄罗斯联邦, Moscow
I. Ermoshin
ZAO Elma-Malakhit
Email: evgig@mail.ru
俄罗斯联邦, Moscow