X-ray Diffractometry Studies of the Structural Properties of Solid Solutions Based on Gallium Nitride

Аннотация

Features of diffractometry multilayer heterostructures based on gallium nitride have been considered. Using a Vector-GaN instrument for X-ray diffractometry, the effect of the technological conditions of the preparation of the layers of the GaAlN/InGaN/GaN/Al₂O₃ heterostructure on their structural perfection has been demonstrated.