Enviar artigo por via de e-mail X-ray Diffractometry Studies of the Structural Properties of Solid Solutions Based on Gallium Nitride
- Autores: Vigdorovich E.1, Ermoshin I.2
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Afiliações:
- Physico-Technological Institute
- ZAO Elma-Malakhit
- Edição: Volume 46, Nº 7 (2017)
- Páginas: 458-461
- Seção: Article
- URL: https://journals.rcsi.science/1063-7397/article/view/186618
- DOI: https://doi.org/10.1134/S1063739717070149
- ID: 186618
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Resumo
Features of diffractometry multilayer heterostructures based on gallium nitride have been considered. Using a Vector-GaN instrument for X-ray diffractometry, the effect of the technological conditions of the preparation of the layers of the GaAlN/InGaN/GaN/Al2O3 heterostructure on their structural perfection has been demonstrated.
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Sobre autores
E. Vigdorovich
Physico-Technological Institute
Autor responsável pela correspondência
Email: evgig@mail.ru
Rússia, Moscow
I. Ermoshin
ZAO Elma-Malakhit
Email: evgig@mail.ru
Rússia, Moscow
