Kinetics of neutral particles in HCl and HBr plasmas at low pressures and high electron concentrations
- 作者: Efremov A.1
-
隶属关系:
- Ivanovo State University of Chemistry and Technology
- 期: 卷 45, 编号 4 (2016)
- 页面: 278-284
- 栏目: Article
- URL: https://journals.rcsi.science/1063-7397/article/view/185702
- DOI: https://doi.org/10.1134/S1063739716040053
- ID: 185702
如何引用文章
详细
The kinetics of the creation and annihilation of neutral particles in HCl and HBr plasmas under the conditions of standard industrial etching reactors is simulated. It is established that the two systems have similar kinetic schemes and exhibit only quantitative differences in plasma compositions. It is show that the HBr plasma is characterized by higher degrees of dissociation of the initial molecules and bromine atomic concentrations in the same temperature and electron concentration ranges.
作者简介
A. Efremov
Ivanovo State University of Chemistry and Technology
编辑信件的主要联系方式.
Email: efremov@isuct.ru
俄罗斯联邦, Ivanovo, 153000