Nanoscaled Profiling of Silicon Surface via Local Anodic Oxidation
- Авторлар: Polyakova V.1, Kots I.1, Smirnov V.1, Ageev O.2
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Мекемелер:
- Department of Nanotechnology and Microsystem Engineering, Institute of Nanotechnologies, Electronics and Instrumentation, Southern Federal University
- Research Center Nanotechnology, Southern Federal University
- Шығарылым: Том 48, № 2 (2019)
- Беттер: 66-71
- Бөлім: Article
- URL: https://journals.rcsi.science/1063-7397/article/view/187088
- DOI: https://doi.org/10.1134/S1063739719020082
- ID: 187088
Дәйексөз келтіру
Аннотация
The nanoscaled profiling of a silicon 5 (111) n-type substrate surface is studied by the local anodic oxidation (LAO). Varying the voltage pulse amplitude from 5 to 12.5 V and the humidity from 30 ± 1 to 70 ± 1% during the LAO is a promising way to form oxide structures with heights from 0.5 ± 0.3 to 2.1 ± 0.1 nm and profiled structures with depths from 0.4 ± 0.3 to 1.5 ± 0.2 nm on the substrate. The results can be applied to the development of technological processes of the element base of silicon-based nanoelectronics using the probe nanotechnologies.
Авторлар туралы
V. Polyakova
Department of Nanotechnology and Microsystem Engineering, Institute of Nanotechnologies, Electronics and Instrumentation, Southern Federal University
Хат алмасуға жауапты Автор.
Email: vpolyakova@sfedu.ru
Ресей, Taganrog, 347922
I. Kots
Department of Nanotechnology and Microsystem Engineering, Institute of Nanotechnologies, Electronics and Instrumentation, Southern Federal University
Email: vpolyakova@sfedu.ru
Ресей, Taganrog, 347922
V. Smirnov
Department of Nanotechnology and Microsystem Engineering, Institute of Nanotechnologies, Electronics and Instrumentation, Southern Federal University
Email: vpolyakova@sfedu.ru
Ресей, Taganrog, 347922
O. Ageev
Research Center Nanotechnology, Southern Federal University
Email: vpolyakova@sfedu.ru
Ресей, Taganrog, 347928