Finite Element Simulation of Frequency Response of MEMS-Microphone
- Authors: Grigor’ev D.M.1, Godovitsyn I.V.1, Amelichev V.V.1, Generalov S.S.1
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Affiliations:
- Scientific-Manufacturing Complex Technological Center MIET
- Issue: Vol 47, No 3 (2018)
- Pages: 211-216
- Section: Article
- URL: https://journals.rcsi.science/1063-7397/article/view/186838
- DOI: https://doi.org/10.1134/S106373971803006X
- ID: 186838
Cite item
Abstract
The frequency response of a MEMS microphone is largely dependent on the design and size of the package. The location and size of the acoustic port, the dimensions of the front and back chamber, and the packaging material are of key importance. In this paper we present the results of calculating the frequency response of a MEMS microphone obtained by finite element modeling (FEM) for two main types of packaging with different positions of the acoustic port. The simulation results are analyzed and compared to the measured frequency response of the MEMS microphone.
About the authors
D. M. Grigor’ev
Scientific-Manufacturing Complex Technological Center MIET
Author for correspondence.
Email: D.Grigorev@tcen.ru
Russian Federation, Zelenograd, Moscow oblast, 124498
I. V. Godovitsyn
Scientific-Manufacturing Complex Technological Center MIET
Email: D.Grigorev@tcen.ru
Russian Federation, Zelenograd, Moscow oblast, 124498
V. V. Amelichev
Scientific-Manufacturing Complex Technological Center MIET
Email: D.Grigorev@tcen.ru
Russian Federation, Zelenograd, Moscow oblast, 124498
S. S. Generalov
Scientific-Manufacturing Complex Technological Center MIET
Email: D.Grigorev@tcen.ru
Russian Federation, Zelenograd, Moscow oblast, 124498