Identification and Excitation Mechanisms of the Lines and Bands of Boron-Containing Components in the Optical Emission Spectra of Low-Temperature BF3/Ar Plasmas
- Authors: Kudrya V.P.1
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Affiliations:
- Institute of Physics and Technology, Russian Academy of Sciences
- Issue: Vol 48, No 1 (2019)
- Pages: 37-42
- Section: Article
- URL: https://journals.rcsi.science/1063-7397/article/view/187080
- DOI: https://doi.org/10.1134/S1063739719010050
- ID: 187080
Cite item
Abstract
B and B+ emission lines and the identification of BF emission bands in the spectra of technological BF3/Ar plasmas are analyzed. The bands identified correspond to the electron-vibrational transitions b 3Σ+(ν'') → a3Π(ν'), ν'' = 0–2, and lie in the range 310–340 nm. In the spectra, no emission lines belonging to other boron-containing compounds are observed.
About the authors
V. P. Kudrya
Institute of Physics and Technology, Russian Academy of Sciences
Author for correspondence.
Email: kvp@ftian.ru
Russian Federation, Moscow, 117218