Identification and Excitation Mechanisms of the Lines and Bands of Boron-Containing Components in the Optical Emission Spectra of Low-Temperature BF3/Ar Plasmas


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Resumo

B and B+ emission lines and the identification of BF emission bands in the spectra of technological BF3/Ar plasmas are analyzed. The bands identified correspond to the electron-vibrational transitions b 3Σ+(ν'') → a3Π(ν'), ν'' = 0–2, and lie in the range 310–340 nm. In the spectra, no emission lines belonging to other boron-containing compounds are observed.

Sobre autores

V. Kudrya

Institute of Physics and Technology, Russian Academy of Sciences

Autor responsável pela correspondência
Email: kvp@ftian.ru
Rússia, Moscow, 117218

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