Optimization Problems of Nanosized Semiconductor Heterostructures

Abstract

A new approach is presented that allows solving optimization problems of nanosized semiconductor heterostructures. We have formulated and solved the problem of determining the optimal doping of a barrier layer consisting of a number of sublayers, which provides a preset concentration of electrons in the conduction channel of semiconductor heterostructures. To solve the problem, effective optimization algorithms based on gradient methods are developed. As an example, an Al_0.25GaN/GaN heterostructure with a total barrier layer thickness of 30 nm is considered. The results obtained in the numerical experiment are consistent with the modern trend towards the transition from a homogeneous doping profile to a planar δ-doping in field-effect transistor manufacturing technologies. The developed technique of mathematical simulation and optimization can be used in field-effect transistor manufacturing technologies. The approaches presented in the work create the conditions for the automated design of such structures.