A Thin-Film Platform for Chemical Gas Sensors

Abstract

In the study, a technique for formation of planar microheaters that make it possible to heat an active zone to a temperature higher than 500°С is proposed and successfully implemented. The developed heating elements are distinguished by low power consumption, short response time, and extremely high resistance to impact loads. The synthetic approaches used in the work (anodic oxidation, photolithography, and magnetron sputtering) feature manufacturability and scaling simplicity. This makes planar heating elements a promising platform based on which semiconductor and thermocatalytic sensors of toxic and explosive gases may be created.