A Thin-Film Platform for Chemical Gas Sensors
- Авторы: Roslyakov I.1, Napolskii K.1, Stolyarov V.2, Karpov E.3, Ivashev A.4, Surtaev V.5
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Учреждения:
- Moscow State University
- Moscow Institute of Physics and Technology
- OOO Science and Technology Center of Measuring Gas Sensors
- OOO Aerotest Company
- Rosneft Oil Company
- Выпуск: Том 47, № 4 (2018)
- Страницы: 226-233
- Раздел: Article
- URL: https://journals.rcsi.science/1063-7397/article/view/186849
- DOI: https://doi.org/10.1134/S1063739718040078
- ID: 186849
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Аннотация
In the study, a technique for formation of planar microheaters that make it possible to heat an active zone to a temperature higher than 500°С is proposed and successfully implemented. The developed heating elements are distinguished by low power consumption, short response time, and extremely high resistance to impact loads. The synthetic approaches used in the work (anodic oxidation, photolithography, and magnetron sputtering) feature manufacturability and scaling simplicity. This makes planar heating elements a promising platform based on which semiconductor and thermocatalytic sensors of toxic and explosive gases may be created.
Об авторах
I. Roslyakov
Moscow State University
Автор, ответственный за переписку.
Email: ilya.roslyakov@gmail.com
Россия, Moscow, 119991
K. Napolskii
Moscow State University
Email: ilya.roslyakov@gmail.com
Россия, Moscow, 119991
V. Stolyarov
Moscow Institute of Physics and Technology
Email: ilya.roslyakov@gmail.com
Россия, Dolgoprudny, Moscow oblast, 141700
E. Karpov
OOO Science and Technology Center of Measuring Gas Sensors
Email: ilya.roslyakov@gmail.com
Россия, Lyubertsy, Moscow oblast, 140004
A. Ivashev
OOO Aerotest Company
Email: ilya.roslyakov@gmail.com
Россия, Tomilino, Moscow oblast, 140072
V. Surtaev
Rosneft Oil Company
Email: ilya.roslyakov@gmail.com
Россия, Moscow, 125284