Atomic Layer Deposition of Aluminum Nitride Using Tris(diethylamido)aluminum and Hydrazine or Ammonia
- Authors: Abdulagatov A.I.1, Ramazanov S.M.1, Dallaev R.S.1, Murliev E.K.1, Palchaev D.K.1, Rabadanov M.K.1, Abdulagatov I.M.1
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Affiliations:
- Dagestan State University
- Issue: Vol 47, No 2 (2018)
- Pages: 118-130
- Section: Article
- URL: https://journals.rcsi.science/1063-7397/article/view/186803
- DOI: https://doi.org/10.1134/S1063739718020026
- ID: 186803
Cite item
Abstract
Aluminum nitride (AlNx) films were obtained by atomic layer deposition (ALD) using tris(diethylamido) aluminum(III) (TDEAA) and hydrazine (N2H4) or ammonia (NH3). The quartz crystal microbalance (QCM) data showed that the surface reactions of TDEAA and N2H4 (or NH3) at temperatures from 150 to 225°C were self-limiting. The rates of deposition of the nitride film at 200°C for systems with N2H4 and NH3 coincided: ~1.1 Å/cycle. The ALD AlN films obtained at 200°C using hydrazine had higher density (2.36 g/cm3, 72.4% of bulk density) than those obtained with ammonia (2.22 g/cm3, 68%). The elemental analysis of the film deposited using TDEAA/N2H4 at 200°C showed the presence of carbon (~1.4 at %), oxygen (~3.2 at %), and hydrogen (22.6 at %) impurities. The N/Al atomic concentration ratio was ~1.3. The residual impurity content in the case of N2H4 was lower than for NH3. In general, it was confirmed that hydrazine has a more preferable surface thermochemistry than ammonia.
About the authors
A. I. Abdulagatov
Dagestan State University
Email: ilmutdina@gmail.com
Russian Federation, Makhachkala, The Republic of Dagestan, 367002
Sh. M. Ramazanov
Dagestan State University
Email: ilmutdina@gmail.com
Russian Federation, Makhachkala, The Republic of Dagestan, 367002
R. S. Dallaev
Dagestan State University
Email: ilmutdina@gmail.com
Russian Federation, Makhachkala, The Republic of Dagestan, 367002
E. K. Murliev
Dagestan State University
Email: ilmutdina@gmail.com
Russian Federation, Makhachkala, The Republic of Dagestan, 367002
D. K. Palchaev
Dagestan State University
Email: ilmutdina@gmail.com
Russian Federation, Makhachkala, The Republic of Dagestan, 367002
M. Kh. Rabadanov
Dagestan State University
Email: ilmutdina@gmail.com
Russian Federation, Makhachkala, The Republic of Dagestan, 367002
I. M. Abdulagatov
Dagestan State University
Author for correspondence.
Email: ilmutdina@gmail.com
Russian Federation, Makhachkala, The Republic of Dagestan, 367002