Electrophysical Parameters and Radiation Spectra of Boron Trichloride Plasma

Аннотация

The electrophysical parameters and radiation spectrum of BCl₃ plasma under a DC glow discharge are analyzed. Data on the gas temperature and reduced electrical field intensity are obtained. It is established that the reduced electrical field intensity in BCl₃ plasma practically does not depend on the discharge current (under a constant pressure); moreover, it appreciably decreases with an increase in the gas pressure (under a constant discharge current). It is revealed that a linear increase in the gas temperature with increasing pressure is caused by increasing the specific power expended in the discharge. The radiation spectra of BCl₃ plasma are presented by atomic and molecular components. It is established that with a growth in the current the radiation intensity increases linearly, which corresponds to the mechanism of direct excitation of radiating states under an electronic impact and it is evidence of a lack of secondary processes.