Silicide iridium sensors based on solid sensitive elements
- Authors: Kerimov E.A.1, Musaeva S.N.2
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Affiliations:
- Institute of Cosmic Studies of Natural Resources
- Azerbaijan Technical University
- Issue: Vol 46, No 5 (2017)
- Pages: 329-333
- Section: Article
- URL: https://journals.rcsi.science/1063-7397/article/view/186509
- DOI: https://doi.org/10.1134/S1063739717050043
- ID: 186509
Cite item
Abstract
The experiments that have been carried out show that the times of adsorption and desorption depend both on the structure construction parameters and specific factors. This makes it possible to achieve the optimal time parameters of Ir–SiO2–Si structures by varying these factors.
About the authors
E. A. Kerimov
Institute of Cosmic Studies of Natural Resources
Author for correspondence.
Email: E_Kerimov.fizik@mail.ru
Azerbaijan, Baku, AZ1115
S. N. Musaeva
Azerbaijan Technical University
Email: E_Kerimov.fizik@mail.ru
Azerbaijan, Baku, AZ1073