Silicide iridium sensors based on solid sensitive elements


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Abstract

The experiments that have been carried out show that the times of adsorption and desorption depend both on the structure construction parameters and specific factors. This makes it possible to achieve the optimal time parameters of Ir–SiO2–Si structures by varying these factors.

About the authors

E. A. Kerimov

Institute of Cosmic Studies of Natural Resources

Author for correspondence.
Email: E_Kerimov.fizik@mail.ru
Azerbaijan, Baku, AZ1115

S. N. Musaeva

Azerbaijan Technical University

Email: E_Kerimov.fizik@mail.ru
Azerbaijan, Baku, AZ1073


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