Email this article In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing
- Authors: Filatov Y.D.1, Sidorko V.I.1, Kovalev S.V.1, Filativ O.Y.1, Monteil G.2
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Affiliations:
- Bakul Institute for Superhard Materials
- École Nationale Supérieure de Mécanique et des Microtechniques
- Issue: Vol 39, No 4 (2017)
- Pages: 282-287
- Section: Investigation of Machining Processes
- URL: https://journals.rcsi.science/1063-4576/article/view/185935
- DOI: https://doi.org/10.3103/S1063457617040086
- ID: 185935
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Abstract
The in-process monitoring of surface shape of optical surfaces directly in the course of polishing is demonstrated to be accomplished through the confocal chromatic imaging technology. A linear relationship has been found between the deviation from square waveform and the variation of the workpiece surface shape.
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About the authors
Yu. D. Filatov
Bakul Institute for Superhard Materials
Author for correspondence.
Email: filatov@ism.kiev.ua
Ukraine, vul. Avtozavods’ka 2, Kiev, 04074
V. I. Sidorko
Bakul Institute for Superhard Materials
Email: filatov@ism.kiev.ua
Ukraine, vul. Avtozavods’ka 2, Kiev, 04074
S. V. Kovalev
Bakul Institute for Superhard Materials
Email: filatov@ism.kiev.ua
Ukraine, vul. Avtozavods’ka 2, Kiev, 04074
O. Yu. Filativ
Bakul Institute for Superhard Materials
Email: filatov@ism.kiev.ua
Ukraine, vul. Avtozavods’ka 2, Kiev, 04074
G. Monteil
École Nationale Supérieure de Mécanique et des Microtechniques
Email: filatov@ism.kiev.ua
France, 26, rue de l’épitaphe CS 51813, Besançon, 25030
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