Отправить статью по E-mail An Acousto-Electric Nanobiosensor
- Авторы: Melnikov A.E.1, Soldatov E.S.1,2, Kuznetsova I.E.3, Kolesov V.V.3, Anisimkin V.I.3, Kashin V.V.3
-
Учреждения:
- Faculty of Physics, Moscow State University
- Center for Quantum Technologies, Moscow State University
- Institute of Radioengineering and Electronics, Russian Academy of Sciences
- Выпуск: Том 83, № 1 (2019)
- Страницы: 52-54
- Раздел: Article
- URL: https://journals.rcsi.science/1062-8738/article/view/187137
- DOI: https://doi.org/10.3103/S1062873819010167
- ID: 187137
Цитировать
Открытый доступ
Доступ предоставлен
Только для подписчиков
Аннотация
A technology is developed that uses two multiscale structures on a single crystal piezoelectric substrate of lithium niobate. A system of counter-pin electrodes for an acoustic delay line operating in the 2–3 MHz range is formed via photolithography. The system is combined with nanotransducers 60–80 nm in size, produced by means of negative electron-beam nanolithography.
Об авторах
A. Melnikov
Faculty of Physics, Moscow State University
Автор, ответственный за переписку.
Email: alexen96@gmail.com
Россия, Moscow, 119991
E. Soldatov
Faculty of Physics, Moscow State University; Center for Quantum Technologies, Moscow State University
Email: alexen96@gmail.com
Россия, Moscow, 119991; Moscow, 119991
I. Kuznetsova
Institute of Radioengineering and Electronics, Russian Academy of Sciences
Email: alexen96@gmail.com
Россия, Moscow, 125009
V. Kolesov
Institute of Radioengineering and Electronics, Russian Academy of Sciences
Email: alexen96@gmail.com
Россия, Moscow, 125009
V. Anisimkin
Institute of Radioengineering and Electronics, Russian Academy of Sciences
Email: alexen96@gmail.com
Россия, Moscow, 125009
V. Kashin
Institute of Radioengineering and Electronics, Russian Academy of Sciences
Email: alexen96@gmail.com
Россия, Moscow, 125009
Дополнительные файлы
