An Acousto-Electric Nanobiosensor
- Autores: Melnikov A.E.1, Soldatov E.S.1,2, Kuznetsova I.E.3, Kolesov V.V.3, Anisimkin V.I.3, Kashin V.V.3
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Afiliações:
- Faculty of Physics, Moscow State University
- Center for Quantum Technologies, Moscow State University
- Institute of Radioengineering and Electronics, Russian Academy of Sciences
- Edição: Volume 83, Nº 1 (2019)
- Páginas: 52-54
- Seção: Article
- URL: https://journals.rcsi.science/1062-8738/article/view/187137
- DOI: https://doi.org/10.3103/S1062873819010167
- ID: 187137
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Resumo
A technology is developed that uses two multiscale structures on a single crystal piezoelectric substrate of lithium niobate. A system of counter-pin electrodes for an acoustic delay line operating in the 2–3 MHz range is formed via photolithography. The system is combined with nanotransducers 60–80 nm in size, produced by means of negative electron-beam nanolithography.
Sobre autores
A. Melnikov
Faculty of Physics, Moscow State University
Autor responsável pela correspondência
Email: alexen96@gmail.com
Rússia, Moscow, 119991
E. Soldatov
Faculty of Physics, Moscow State University; Center for Quantum Technologies, Moscow State University
Email: alexen96@gmail.com
Rússia, Moscow, 119991; Moscow, 119991
I. Kuznetsova
Institute of Radioengineering and Electronics, Russian Academy of Sciences
Email: alexen96@gmail.com
Rússia, Moscow, 125009
V. Kolesov
Institute of Radioengineering and Electronics, Russian Academy of Sciences
Email: alexen96@gmail.com
Rússia, Moscow, 125009
V. Anisimkin
Institute of Radioengineering and Electronics, Russian Academy of Sciences
Email: alexen96@gmail.com
Rússia, Moscow, 125009
V. Kashin
Institute of Radioengineering and Electronics, Russian Academy of Sciences
Email: alexen96@gmail.com
Rússia, Moscow, 125009
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