An Acousto-Electric Nanobiosensor


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Resumo

A technology is developed that uses two multiscale structures on a single crystal piezoelectric substrate of lithium niobate. A system of counter-pin electrodes for an acoustic delay line operating in the 2–3 MHz range is formed via photolithography. The system is combined with nanotransducers 60–80 nm in size, produced by means of negative electron-beam nanolithography.

Sobre autores

A. Melnikov

Faculty of Physics, Moscow State University

Autor responsável pela correspondência
Email: alexen96@gmail.com
Rússia, Moscow, 119991

E. Soldatov

Faculty of Physics, Moscow State University; Center for Quantum Technologies, Moscow State University

Email: alexen96@gmail.com
Rússia, Moscow, 119991; Moscow, 119991

I. Kuznetsova

Institute of Radioengineering and Electronics, Russian Academy of Sciences

Email: alexen96@gmail.com
Rússia, Moscow, 125009

V. Kolesov

Institute of Radioengineering and Electronics, Russian Academy of Sciences

Email: alexen96@gmail.com
Rússia, Moscow, 125009

V. Anisimkin

Institute of Radioengineering and Electronics, Russian Academy of Sciences

Email: alexen96@gmail.com
Rússia, Moscow, 125009

V. Kashin

Institute of Radioengineering and Electronics, Russian Academy of Sciences

Email: alexen96@gmail.com
Rússia, Moscow, 125009

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