An Acousto-Electric Nanobiosensor

A. E. Melnikov; E. S. Soldatov; I. E. Kuznetsova; V. V. Kolesov; V. I. Anisimkin; V. V. Kashin

doi:10.3103/S1062873819010167

An Acousto-Electric Nanobiosensor

Authors: Melnikov A.E.¹, Soldatov E.S.¹^,2, Kuznetsova I.E.³, Kolesov V.V.³, Anisimkin V.I.³, Kashin V.V.³
Affiliations:
1. Faculty of Physics, Moscow State University
2. Center for Quantum Technologies, Moscow State University
3. Institute of Radioengineering and Electronics, Russian Academy of Sciences
Issue: Vol 83, No 1 (2019)
Pages: 52-54
Section: Article
URL: https://journals.rcsi.science/1062-8738/article/view/187137
DOI: https://doi.org/10.3103/S1062873819010167
ID: 187137

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Abstract

A technology is developed that uses two multiscale structures on a single crystal piezoelectric substrate of lithium niobate. A system of counter-pin electrodes for an acoustic delay line operating in the 2–3 MHz range is formed via photolithography. The system is combined with nanotransducers 60–80 nm in size, produced by means of negative electron-beam nanolithography.