Molecular Dynamic Simulation of Silicon Irradiation with 2–8 keV Buckminsterfullerene C60 Ions
- Авторлар: Karasev K.1, Strizhkin D.2, Titov A.2, Karaseov P.2
-
Мекемелер:
- Academic university named after Alferov
- Polytechnic university named after Peter the Great
- Шығарылым: № 1 (2023)
- Беттер: 74-79
- Бөлім: Articles
- URL: https://journals.rcsi.science/1028-0960/article/view/137662
- DOI: https://doi.org/10.31857/S1028096023010107
- EDN: https://elibrary.ru/BLCQCB
- ID: 137662
Дәйексөз келтіру
Аннотация
The processes taking place on the (100)Si surface irradiated by 2–8 keV buckminsterfullerene C60 ions at temperatures ranging from 0 to 700 K are examined using molecular dynamics computer simulations. Tersoff-ZBL and Airebo potentials are used to describe pairwise interactions, inelastic energy loss is taken into account for fast atoms. The results show that crystal temperature has no influence on the collision cascade development, but affect its thermalisation and crater formation on the surface. With the C60 ion energy increase, carbon atoms penetrate deeper into the target, both crater volume and size of the rim around it enlarges. Temperature increase to 700 K leads to more effective crater and rim formation comparing to 0 and 300 K cases. We propose possible explanation of the revealed phenomenon.
Негізгі сөздер
Авторлар туралы
K. Karasev
Academic university named after Alferov
Хат алмасуға жауапты Автор.
Email: kir.karasyov2017@yandex.ru
Russia, 195251, Saint-Petersburg
D. Strizhkin
Polytechnic university named after Peter the Great
Email: platon.karaseov@spbstu.ru
Russia, 195251, Saint-Petersburg
A. Titov
Polytechnic university named after Peter the Great
Email: platon.karaseov@spbstu.ru
Russia, 195251, Saint-Petersburg
P. Karaseov
Polytechnic university named after Peter the Great
Хат алмасуға жауапты Автор.
Email: platon.karaseov@spbstu.ru
Russia, 195251, Saint-Petersburg
Әдебиет тізімі
- Zhang J., Terrones M., Park C.R., Mukherjee R, Monthioux M., Koratkar N., Kim Y. S., Hurt R., Frackowiak E., Enoki T., Chen Y., Chen Y., Bianco A. // Carbon Science in 2016: Status, Challenges and Perspectives Carbon. 2016. V. 98. P. 708. https://doi.org/10.1016/j.carbon.2015.11.060
- Бочвар Д.А., Гальперн Э.Г. // Доклады Академии Наук СССР. 1973. Т. 209. С. 610.
- Robertson J. // Mater. Sci. Eng. Res. 2002. V. 37. P. 129. https://doi.org/10.1016/S0927-796X(02)00005-0
- Khadem M., Pukha V.E., Penkov O.V. et al. // Surf. Coat. Technol. 2021. V. 424. P. 127670. https://doi.org/10.1016/j.surfcoat.2021.127670
- Pukha V.E., Pugachov A.T., Churakova N.P., Zubarev E.N., Vinogradov V.E., Nam S.C. // J. Nanosci. Nanotechnol. 2012. V. 12. № 6. P. 4762. https://doi.org/10.1166/jnn.2012.4925
- Penkov O.V., Pukha V.E., Starikova S.L., Khadem M., Starikov V.V., Maleev M.V., Kim D.E. // Biomaterials. 2016. V. 102. P. 130. https://doi.org/10.1016/j.biomaterials.2016.06.029
- Аброян И.А., Андронов А.Н., Титов А.И. Физические основы электронной и ионной технологии. М.: Высшая школа, 1984. 135 с.
- Postawa Z., Czerwinski B., Szewczyk M., Smiley E.J., Winograd N., Garrison B.J. // Anal. Chem. 2003. V. 75. P. 4402. https://doi.org/10.1021/ac034387a
- Delcorte A., Garrison B.J. // J. Phys. Chem. 2007. V. 111. P. 15312. https://doi.org/10.1021/jp074536j
- Krantzman K.D., Kingsbury D.B., Garrison B.J. // Appl. Surf. Sci. 2006. V. 252. P. 6463. https://doi.org/10.1016/j.apsusc.2006.02.276
- Krantzman K.D., Garrison B.J. // Surf. Interface Anal. 2011. V. 43. P. 123. https://doi.org/10.1002/sia.3438
- Krantzman K.D., Wucher A. // J. Phys. Chem. C. 2010. V. 114. № 12. P. 5480.https://doi.org/10.1021/jp906050f
- Малеев М.В., Зубарев Е.Н., Пуха В.Е., Дроздов А.Н., Вус А.С., Девизенко А.Ю. // ФИП. 2015. Т. 13. С. 91. https://doi.org/10.15407/mfint.37.06.0775
- Pukha V., Popova J., Khadem M., Dae-Eun Kim, Khodos I., Shakhmin A., Mishin M., Krainov K., Titov A., Karaseov P. // Formation of Functional Conductive Carbon Coating on Si by C60 Ion Beam. In: International Youth Conference on Electronics, Telecommunications and Information Technologies. Springer Proceedings in Physics. 2020. V. 255 / Ed. Velichko E. et al., Springer, Cham. https://doi.org/10.1007/978-3-030-58868-7_15
- Pukha V., Belmesov A., Glukhov A., Khodos I., Khadem M., Kim D.-E., Krainov K., Shakhmin A., Karaseov P. // Features of the Conductive Carbon Coatings Formation on Titanium Electrodes Using C60 Ion Beams. In: International Youth Conference on Electronics, Telecommunications and Information Technologies. Springer Proceedings in Physics. 2022. V. 268 / Ed. Velichko E., Kapralova V., Karaseov P., et al., Springer, Cham. https://doi.org/10.1007/978-3-030-81119-8_41
- Thompson A.P., Aktulga H.M., Berger R. et al. // Comp. Phys. Comm. 2022. V. 271. P. 10817. https://doi.org/10.1016/j.cpc.2021.108171
- Stuart S.J., Tutein A.B., Harrison J.A. // J. Chem. Phys. 2000. V. 112. P. 6472. https://doi.org/10.1063/1.481208
- Tersoff J. // Phys. Rev. B. 1988. V. 37. P. 6991. https://doi.org/10.1103/PhysRevB.37.6991
- Ziegler J.F., Biersack J.P. // The Stopping and Range of Ions in Matter. In: Treatise on Heavy-Ion Science / Ed. Bromley D.A. Springer, Boston, MA, 1985
- Berendsen H.J.C., Postma J.P.M., van Gunsteren W.F., DiNola A., Haak J.R. // J. Chem. Phys. 1984. V. 81. P. 3684. https://doi.org/10.1063/1.448118
- Aurenhammer F. // ACM Computing Surveys. 1991. V. 23. № 3. P. 345. https://doi.org/10.1145/116873.116880
- Ullah M.W., Kuronen A., Nordlund K., Djurabekova F., Karaseov P.A., Titov A.I. // J. Appl. Phys. 2012. V. 112. P. 043517. https://doi.org/10.1063/1.4747917
- Aoki T. // J. Comput. Electron. 2014. V. 13. P. 108. https://doi.org/10.1007/s10825-013-0504-5