Evolution of properties in composite carbon films under thermal conditions and in the presence of a catalyst

S. N. Belyaev; G. G. Kirpilenko; E. P. Kirilenko; A. V. Goryachev; E. A. Il’ichev; G. S. Rychkov; G. N. Petrukhin; E. S. Migunova; E. Yu. Shelyukhin; D. A. Dronova

doi:10.1134/S1027451016040042

Evolution of properties in composite carbon films under thermal conditions and in the presence of a catalyst

Авторы: Belyaev S.N.¹, Kirpilenko G.G.¹, Kirilenko E.P.¹, Goryachev A.V.¹, Il’ichev E.A.², Rychkov G.S.², Petrukhin G.N.², Migunova E.S.¹, Shelyukhin E.Y.¹, Dronova D.A.¹
Учреждения:
1. National Research University “Moscow Institute of Electronic Engineering”
2. Research Institute for Physical Problems
Выпуск: Том 10, № 4 (2016)
Страницы: 753-757
Раздел: Article
URL: https://journals.rcsi.science/1027-4510/article/view/189257
DOI: https://doi.org/10.1134/S1027451016040042
ID: 189257

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The characteristics of composite carbon films are experimentally studied. The films are synthesized under concurrent conditions of the magnetron and plasmatron sputtering of molybdenum disilicide and polyphenyl methylsiloxane (PPMS 2/5). Automodulation of the elemental and phase composition is found and studied in the direction of film deposition onto the substrate. The stability of the automodulation parameters to subsequent high-temperature annealing is examined.