Evolution of properties in composite carbon films under thermal conditions and in the presence of a catalyst
- Authors: Belyaev S.N.1, Kirpilenko G.G.1, Kirilenko E.P.1, Goryachev A.V.1, Il’ichev E.A.2, Rychkov G.S.2, Petrukhin G.N.2, Migunova E.S.1, Shelyukhin E.Y.1, Dronova D.A.1
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Affiliations:
- National Research University “Moscow Institute of Electronic Engineering”
- Research Institute for Physical Problems
- Issue: Vol 10, No 4 (2016)
- Pages: 753-757
- Section: Article
- URL: https://journals.rcsi.science/1027-4510/article/view/189257
- DOI: https://doi.org/10.1134/S1027451016040042
- ID: 189257
Cite item
Abstract
The characteristics of composite carbon films are experimentally studied. The films are synthesized under concurrent conditions of the magnetron and plasmatron sputtering of molybdenum disilicide and polyphenyl methylsiloxane (PPMS 2/5). Automodulation of the elemental and phase composition is found and studied in the direction of film deposition onto the substrate. The stability of the automodulation parameters to subsequent high-temperature annealing is examined.
About the authors
S. N. Belyaev
National Research University “Moscow Institute of Electronic Engineering”
Email: edil44@mail.ru
Russian Federation, Moscow, Zelenograd, 124498
G. G. Kirpilenko
National Research University “Moscow Institute of Electronic Engineering”
Email: edil44@mail.ru
Russian Federation, Moscow, Zelenograd, 124498
E. P. Kirilenko
National Research University “Moscow Institute of Electronic Engineering”
Email: edil44@mail.ru
Russian Federation, Moscow, Zelenograd, 124498
A. V. Goryachev
National Research University “Moscow Institute of Electronic Engineering”
Email: edil44@mail.ru
Russian Federation, Moscow, Zelenograd, 124498
E. A. Il’ichev
Research Institute for Physical Problems
Author for correspondence.
Email: edil44@mail.ru
Russian Federation, Moscow, Zelenograd, 124498
G. S. Rychkov
Research Institute for Physical Problems
Email: edil44@mail.ru
Russian Federation, Moscow, Zelenograd, 124498
G. N. Petrukhin
Research Institute for Physical Problems
Email: edil44@mail.ru
Russian Federation, Moscow, Zelenograd, 124498
E. S. Migunova
National Research University “Moscow Institute of Electronic Engineering”
Email: edil44@mail.ru
Russian Federation, Moscow, Zelenograd, 124498
E. Yu. Shelyukhin
National Research University “Moscow Institute of Electronic Engineering”
Email: edil44@mail.ru
Russian Federation, Moscow, Zelenograd, 124498
D. A. Dronova
National Research University “Moscow Institute of Electronic Engineering”
Email: edil44@mail.ru
Russian Federation, Moscow, Zelenograd, 124498
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