Evolution of properties in composite carbon films under thermal conditions and in the presence of a catalyst


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Abstract

The characteristics of composite carbon films are experimentally studied. The films are synthesized under concurrent conditions of the magnetron and plasmatron sputtering of molybdenum disilicide and polyphenyl methylsiloxane (PPMS 2/5). Automodulation of the elemental and phase composition is found and studied in the direction of film deposition onto the substrate. The stability of the automodulation parameters to subsequent high-temperature annealing is examined.

About the authors

S. N. Belyaev

National Research University “Moscow Institute of Electronic Engineering”

Email: edil44@mail.ru
Russian Federation, Moscow, Zelenograd, 124498

G. G. Kirpilenko

National Research University “Moscow Institute of Electronic Engineering”

Email: edil44@mail.ru
Russian Federation, Moscow, Zelenograd, 124498

E. P. Kirilenko

National Research University “Moscow Institute of Electronic Engineering”

Email: edil44@mail.ru
Russian Federation, Moscow, Zelenograd, 124498

A. V. Goryachev

National Research University “Moscow Institute of Electronic Engineering”

Email: edil44@mail.ru
Russian Federation, Moscow, Zelenograd, 124498

E. A. Il’ichev

Research Institute for Physical Problems

Author for correspondence.
Email: edil44@mail.ru
Russian Federation, Moscow, Zelenograd, 124498

G. S. Rychkov

Research Institute for Physical Problems

Email: edil44@mail.ru
Russian Federation, Moscow, Zelenograd, 124498

G. N. Petrukhin

Research Institute for Physical Problems

Email: edil44@mail.ru
Russian Federation, Moscow, Zelenograd, 124498

E. S. Migunova

National Research University “Moscow Institute of Electronic Engineering”

Email: edil44@mail.ru
Russian Federation, Moscow, Zelenograd, 124498

E. Yu. Shelyukhin

National Research University “Moscow Institute of Electronic Engineering”

Email: edil44@mail.ru
Russian Federation, Moscow, Zelenograd, 124498

D. A. Dronova

National Research University “Moscow Institute of Electronic Engineering”

Email: edil44@mail.ru
Russian Federation, Moscow, Zelenograd, 124498

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