Atomic-Force Microscopy in the Study of the Tribological Characteristics of Thin Al−Si−N Coatings


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Resumo

Results of the atomic-force microscopic determination of the surface microstructure and roughness, friction forces and coefficients of nanocrystalline AlSiN films in the initial state and after annealing are presented. A procedure is proposed to determine the friction coefficients by atomic-force microscopy with multi-pass scanning. The dependences of the friction coefficients on the number of passes are obtained. A significant effect of annealing on a decrease in the friction coefficients of AlSiN films is detected.

Sobre autores

T. Kuznetsova

A.V. Luikov Heat and Mass Transfer Institute of NAS Belarus

Autor responsável pela correspondência
Email: kuzn06@mail.ru
Belarus, Minsk, 220072

T. Zubar

A.V. Luikov Heat and Mass Transfer Institute of NAS Belarus

Email: kuzn06@mail.ru
Belarus, Minsk, 220072

V. Lapitskaya

A.V. Luikov Heat and Mass Transfer Institute of NAS Belarus

Email: kuzn06@mail.ru
Belarus, Minsk, 220072

K. Sudilovskaya

A.V. Luikov Heat and Mass Transfer Institute of NAS Belarus

Email: kuzn06@mail.ru
Belarus, Minsk, 220072

S. Chizhik

A.V. Luikov Heat and Mass Transfer Institute of NAS Belarus

Email: kuzn06@mail.ru
Belarus, Minsk, 220072

V. Uglov

Belarusian State University

Email: kuzn06@mail.ru
Belarus, Minsk, 220030

V. Shimanskii

Belarusian State University

Email: kuzn06@mail.ru
Belarus, Minsk, 220030

N. Kvasov

Belarusian State University

Email: kuzn06@mail.ru
Belarus, Minsk, 220030

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