Atomic-Force Microscopy in the Study of the Tribological Characteristics of Thin Al−Si−N Coatings
- Авторы: Kuznetsova T.A.1, Zubar T.I.1, Lapitskaya V.A.1, Sudilovskaya K.A.1, Chizhik S.A.1, Uglov V.V.2, Shimanskii V.I.2, Kvasov N.T.2
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Учреждения:
- A.V. Luikov Heat and Mass Transfer Institute of NAS Belarus
- Belarusian State University
- Выпуск: Том 13, № 1 (2019)
- Страницы: 36-40
- Раздел: Article
- URL: https://journals.rcsi.science/1027-4510/article/view/196199
- DOI: https://doi.org/10.1134/S1027451019010117
- ID: 196199
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Аннотация
Results of the atomic-force microscopic determination of the surface microstructure and roughness, friction forces and coefficients of nanocrystalline AlSiN films in the initial state and after annealing are presented. A procedure is proposed to determine the friction coefficients by atomic-force microscopy with multi-pass scanning. The dependences of the friction coefficients on the number of passes are obtained. A significant effect of annealing on a decrease in the friction coefficients of AlSiN films is detected.
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Об авторах
T. Kuznetsova
A.V. Luikov Heat and Mass Transfer Institute of NAS Belarus
Автор, ответственный за переписку.
Email: kuzn06@mail.ru
Белоруссия, Minsk, 220072
T. Zubar
A.V. Luikov Heat and Mass Transfer Institute of NAS Belarus
Email: kuzn06@mail.ru
Белоруссия, Minsk, 220072
V. Lapitskaya
A.V. Luikov Heat and Mass Transfer Institute of NAS Belarus
Email: kuzn06@mail.ru
Белоруссия, Minsk, 220072
K. Sudilovskaya
A.V. Luikov Heat and Mass Transfer Institute of NAS Belarus
Email: kuzn06@mail.ru
Белоруссия, Minsk, 220072
S. Chizhik
A.V. Luikov Heat and Mass Transfer Institute of NAS Belarus
Email: kuzn06@mail.ru
Белоруссия, Minsk, 220072
V. Uglov
Belarusian State University
Email: kuzn06@mail.ru
Белоруссия, Minsk, 220030
V. Shimanskii
Belarusian State University
Email: kuzn06@mail.ru
Белоруссия, Minsk, 220030
N. Kvasov
Belarusian State University
Email: kuzn06@mail.ru
Белоруссия, Minsk, 220030
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