Application of cluster beams for the physics and technologies of microstructures

A. N. Nechay; N. N. Salashchenko; N. I. Chkhalo

doi:10.1134/S1027451017030120

Application of cluster beams for the physics and technologies of microstructures

作者: Nechay A.N.¹, Salashchenko N.N.¹, Chkhalo N.I.¹
隶属关系:
1. Institute for Physics of Microstructures
期: 卷 11, 编号 3 (2017)
页面: 496-500
栏目: Article
URL: https://journals.rcsi.science/1027-4510/article/view/192933
DOI: https://doi.org/10.1134/S1027451017030120
ID: 192933

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详细

The paper presents a brief review of the possible applications of cluster beams for emission in the short-wavelength region for the treatment of ultrasmooth surfaces and the fabrication of nanostructures. An experimental device which is under development is described in brief, and its calculated characteristics are presented. The issues that can be resolved by means of this device are outlined.