Application of cluster beams for the physics and technologies of microstructures
- 作者: Nechay A.N.1, Salashchenko N.N.1, Chkhalo N.I.1
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隶属关系:
- Institute for Physics of Microstructures
- 期: 卷 11, 编号 3 (2017)
- 页面: 496-500
- 栏目: Article
- URL: https://journals.rcsi.science/1027-4510/article/view/192933
- DOI: https://doi.org/10.1134/S1027451017030120
- ID: 192933
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详细
The paper presents a brief review of the possible applications of cluster beams for emission in the short-wavelength region for the treatment of ultrasmooth surfaces and the fabrication of nanostructures. An experimental device which is under development is described in brief, and its calculated characteristics are presented. The issues that can be resolved by means of this device are outlined.
作者简介
A. Nechay
Institute for Physics of Microstructures
编辑信件的主要联系方式.
Email: nechay@ipm.sci-nnov.ru
俄罗斯联邦, Nizhny Novgorod, 603950
N. Salashchenko
Institute for Physics of Microstructures
Email: nechay@ipm.sci-nnov.ru
俄罗斯联邦, Nizhny Novgorod, 603950
N. Chkhalo
Institute for Physics of Microstructures
Email: nechay@ipm.sci-nnov.ru
俄罗斯联邦, Nizhny Novgorod, 603950
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