Procedure for determining defects in sputtered clusters of ionic crystals


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Resumo

The results obtained using methods of total current spectroscopy (TCS) and secondary-ion mass spectroscopy (SIMS) under ion bombardment of LiF crystals are analyzed. It is shown that the majority of the products of crystal sputtering contain point defects. A procedure for determining defects in sputtered clusters of ionic crystals is developed.

Sobre autores

U. Sharopov

Institute of Ion-Plasma and Laser Technologies

Autor responsável pela correspondência
Email: utkirstar@gmail.com
Uzbequistão, Tashkent, 100125

B. Atabaev

Institute of Ion-Plasma and Laser Technologies

Email: utkirstar@gmail.com
Uzbequistão, Tashkent, 100125

R. Djabbarganov

Institute of Ion-Plasma and Laser Technologies

Email: utkirstar@gmail.com
Uzbequistão, Tashkent, 100125

M. Kurbanov

Institute of Ion-Plasma and Laser Technologies

Email: utkirstar@gmail.com
Uzbequistão, Tashkent, 100125

M. Sharipov

Institute of Ion-Plasma and Laser Technologies

Email: utkirstar@gmail.com
Uzbequistão, Tashkent, 100125

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