Procedure for determining defects in sputtered clusters of ionic crystals


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The results obtained using methods of total current spectroscopy (TCS) and secondary-ion mass spectroscopy (SIMS) under ion bombardment of LiF crystals are analyzed. It is shown that the majority of the products of crystal sputtering contain point defects. A procedure for determining defects in sputtered clusters of ionic crystals is developed.

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U. Sharopov

Institute of Ion-Plasma and Laser Technologies

编辑信件的主要联系方式.
Email: utkirstar@gmail.com
乌兹别克斯坦, Tashkent, 100125

B. Atabaev

Institute of Ion-Plasma and Laser Technologies

Email: utkirstar@gmail.com
乌兹别克斯坦, Tashkent, 100125

R. Djabbarganov

Institute of Ion-Plasma and Laser Technologies

Email: utkirstar@gmail.com
乌兹别克斯坦, Tashkent, 100125

M. Kurbanov

Institute of Ion-Plasma and Laser Technologies

Email: utkirstar@gmail.com
乌兹别克斯坦, Tashkent, 100125

M. Sharipov

Institute of Ion-Plasma and Laser Technologies

Email: utkirstar@gmail.com
乌兹别克斯坦, Tashkent, 100125

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