On the use of an external reference sample in the X-ray diffraction analysis of epitaxial layers

Resumo

The differences in the high-resolution X-ray patterns for measurement of the crystal-lattice constant with and without the use of an external reference sample are discussed. The calculation procedures in the measurement of the lattice constant are compared. The results of the measurements of a Si(111) test crystal using a Bruker D8 Discover diffractometer are presented, and the examples of the use of this crystal as an external reference are described.