On the use of an external reference sample in the X-ray diffraction analysis of epitaxial layers


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Abstract

The differences in the high-resolution X-ray patterns for measurement of the crystal-lattice constant with and without the use of an external reference sample are discussed. The calculation procedures in the measurement of the lattice constant are compared. The results of the measurements of a Si(111) test crystal using a Bruker D8 Discover diffractometer are presented, and the examples of the use of this crystal as an external reference are described.

About the authors

Yu. N. Drozdov

Institute for Physics of Microstructures; Lobachevsky State University

Author for correspondence.
Email: drozdyu@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 603950; pr. Gagarina 23, Nizhny Novgorod, 603950

P. A. Yunin

Institute for Physics of Microstructures; Lobachevsky State University

Email: drozdyu@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 603950; pr. Gagarina 23, Nizhny Novgorod, 603950

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