Мақаланы E-mail арқылы жіберу Determination of the Thickness of Thin Films Based on Scanning Electron Microscopy and Energy Dispersive X-Ray Analysis
- Авторлар: Sokolov S.A.1,2, Milovanov R.A.2,3, Sidorov L.N.1
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Мекемелер:
- Moscow State University
- Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences
- Moscow Technological University
- Шығарылым: Том 13, № 5 (2019)
- Беттер: 836-847
- Бөлім: Article
- URL: https://journals.rcsi.science/1027-4510/article/view/196450
- DOI: https://doi.org/10.1134/S1027451019050136
- ID: 196450
Дәйексөз келтіру
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Рұқсат берілді
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Аннотация
The review is devoted to modern techniques of the nondestructive determination of the thickness of thin films based on scanning electron microscopy and energy dispersive X-ray analysis. A general approach for determining the thickness of thin films by these methods is described along with detailed specific techniques, their advantages and disadvantages.
Авторлар туралы
S. Sokolov
Moscow State University; Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences
Хат алмасуға жауапты Автор.
Email: sokolovsa48@gmail.com
Ресей, Moscow, 119991; Moscow, 119991
R. Milovanov
Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences; Moscow Technological University
Email: sokolovsa48@gmail.com
Ресей, Moscow, 119991; Moscow, 119454
L. Sidorov
Moscow State University
Email: sokolovsa48@gmail.com
Ресей, Moscow, 119991
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