Enviar artigo por via de e-mail Determination of the Thickness of Thin Films Based on Scanning Electron Microscopy and Energy Dispersive X-Ray Analysis
- Autores: Sokolov S.A.1,2, Milovanov R.A.2,3, Sidorov L.N.1
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Afiliações:
- Moscow State University
- Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences
- Moscow Technological University
- Edição: Volume 13, Nº 5 (2019)
- Páginas: 836-847
- Seção: Article
- URL: https://journals.rcsi.science/1027-4510/article/view/196450
- DOI: https://doi.org/10.1134/S1027451019050136
- ID: 196450
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Resumo
The review is devoted to modern techniques of the nondestructive determination of the thickness of thin films based on scanning electron microscopy and energy dispersive X-ray analysis. A general approach for determining the thickness of thin films by these methods is described along with detailed specific techniques, their advantages and disadvantages.
Sobre autores
S. Sokolov
Moscow State University; Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences
Autor responsável pela correspondência
Email: sokolovsa48@gmail.com
Rússia, Moscow, 119991; Moscow, 119991
R. Milovanov
Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences; Moscow Technological University
Email: sokolovsa48@gmail.com
Rússia, Moscow, 119991; Moscow, 119454
L. Sidorov
Moscow State University
Email: sokolovsa48@gmail.com
Rússia, Moscow, 119991
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