Email this article Determination of the Thickness of Thin Films Based on Scanning Electron Microscopy and Energy Dispersive X-Ray Analysis
- Authors: Sokolov S.A.1,2, Milovanov R.A.2,3, Sidorov L.N.1
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Affiliations:
- Moscow State University
- Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences
- Moscow Technological University
- Issue: Vol 13, No 5 (2019)
- Pages: 836-847
- Section: Article
- URL: https://journals.rcsi.science/1027-4510/article/view/196450
- DOI: https://doi.org/10.1134/S1027451019050136
- ID: 196450
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Abstract
The review is devoted to modern techniques of the nondestructive determination of the thickness of thin films based on scanning electron microscopy and energy dispersive X-ray analysis. A general approach for determining the thickness of thin films by these methods is described along with detailed specific techniques, their advantages and disadvantages.
About the authors
S. A. Sokolov
Moscow State University; Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences
Author for correspondence.
Email: sokolovsa48@gmail.com
Russian Federation, Moscow, 119991; Moscow, 119991
R. A. Milovanov
Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences; Moscow Technological University
Email: sokolovsa48@gmail.com
Russian Federation, Moscow, 119991; Moscow, 119454
L. N. Sidorov
Moscow State University
Email: sokolovsa48@gmail.com
Russian Federation, Moscow, 119991
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