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Formation of Films of Tungsten and its Oxides in a High-Frequency Capacitive Discharge in a D2-O2 Mixture
Gorodetsky A.E., Zalavutdinov R.K., Bukhovets V.L., Markin A.V., Zakharov A.P., Zolotarevsky V.I., Voytitsky V.L., Rybkina T.V., Kazansky L.P., Arkhipushkin I.A., Mukhin E.E., Razdobarin A.G.
Influence of annealing on the optical properties and chemical and phase compositions of tungsten-oxide films
Shapovalov V.I., Komlev A.E., Vit’ko V.V., Zav’yalov A.V., Lapshin A.E., Moshkalev S.A., Ermakov V.A.
Tungsten-oxide thin films for a high-temperature semiconductor hydrogen detector based on a 6H-SiC crystal
Fominski V.Y., Grigoriev S.N., Demin M.V., Zuev V.V., Romanov R.I., Volosova M.A.
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